发明名称 METHOD OF REMOVIN EMULSIONS IN PLASMA JET
摘要 Method of removing emulsion from plasma is characterised in that that the removal process is conducted in plasma removal tunnel device in mixture of gasses O2/CF4, with volume of CF4 in O2 smaller than 1% of gases volume ratio.
申请公布号 PL156972(B1) 申请公布日期 1992.04.30
申请号 PL19880274061 申请日期 1988.08.04
申请人 发明人
分类号 G03F7/36;H01L;H01L21/00;H01L21/306;(IPC1-7):H01L21/00 主分类号 G03F7/36
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