| 摘要 |
<p>PURPOSE:To identify the size of a defect and many kinds of defects on the surface of an inspection sample by having a neuro-computer which determines the state of the inspection sample with a learned scatter pattern. CONSTITUTION:A laser beam which is ejected from a laser beam source 1 is shaped into a desired beam diameter by means of a lens system 2 and scans on the surface of a substance 6 in a sheet shape in a main scanning direction (X direction) by means of a rotary polygon mirror 3. When the surface of the substance 6 in a sheet shape is normal and flat, the laser beam reflects regularly. On the other hand when there is such a defect as an irregularity or the like on the surface of the substance 6 in the sheet shape, the laser beam scatters. These regularly reflected beam and irregularly reflected beam are intercepted at an end face of each fiber (F) of a sensor head 4A so that each output signal of photoelectric transfers 5a to 5e in the direction (Y) becomes a level differential in accordance with quantities of the regularly reflected beam and the irregularly reflected beam on the surface of the substance 6 in the sheet shape. Then, the neuro-computer 14 learns a scatter pattern and its grouping with the differential in the quantities of beams of 5 signals in the (Y) direction so as to determine the state of the surface of the substance 6 in the sheet shape.</p> |
