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发明名称
CHEMICAL AMPLIFIED RESIST MATERIAL
摘要
申请公布号
EP0440374(A3)
申请公布日期
1992.04.29
申请号
EP19910300562
申请日期
1991.01.24
申请人
WAKO PURE CHEMICAL INDUSTRIES LTD
发明人
URANO, FUMIYOSHI;NAKAHATA, MASAAKI;FUJIE, HIROTOSHI;OONO, KEIJI
分类号
G03F7/039;(IPC1-7):G03F7/039;G03F7/075
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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