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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04127434(A)
申请公布日期
1992.04.28
申请号
JP19900249507
申请日期
1990.09.18
申请人
FUJITSU LTD
发明人
OZAWA TAKASHI
分类号
H01L21/3205;H01L21/027;H01L21/30;H01L21/768;H01L23/522
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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