发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To lessen processes after a write process in number by a method wherein by a method wherein a gate electrode is formed, a transistor forming region is covered with mask so as to make a write transistor forming part selectively exposed, and certain conductivity type impurity ions are implanted. CONSTITUTION:A gate electrode 7 of poly-Si is formed. This process includes many detailed processes, but these can be previously executed before a user specification write process. In succession, ion implantation 6a correspondent to ion implantation 6 is carried out using a resist mask 5 as a user specification write process. In the implantation of ions 6a into an exposed transistor forming region, the gate electrode 7 also serves as a mask. The resist mask 5 is removed after the implantation of ions 6a. This process is carried out when a corresponding user mask is prepared after a user specification is determined. In succession, an SiO2 side wall 13 is formed on the side face of the gate electrode 7. Therefore, a write process can be executed after a gate electrode forming process is finished.
申请公布号 JPH04127567(A) 申请公布日期 1992.04.28
申请号 JP19900249221 申请日期 1990.09.19
申请人 FUJITSU LTD 发明人 AKIBA TOSHIHIKO
分类号 H01L27/112;H01L21/8246 主分类号 H01L27/112
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