| 摘要 |
PURPOSE:To execute the positioning control of a deflection mirror with high accuracy by deriving an angle position of the corresponding deflection mirror by a signal of each linear sensor and executing the position control related to a scan, based on a negative feedback of each angle position. CONSTITUTION:The laser marker is provided with an emitting part 7X of a measuring light corresponding to each deflection mirror 2X, 2Y, and linear sensors 8X, 8Y for deriving the direction of a reflected light by the corresponding mirrors 2X, 2Y of the measuring light from this emitting part 7X. In such a state, angle positions of the corresponding deflection mirrors 2X, 2Y are derived by a signal of these linear sensors 8X, 8Y, and based on a negative feedback of each angle position thereof, the scan is controlled, therefore, the positioning control of each deflection mirror 2X, 2Y is executed with high accuracy. |
