| 摘要 |
PURPOSE:To execute the prescribed radiation without making a laser output excessive by providing an XY scanning mirror for allowing a laser light outputted from a laser oscillator in the two-dimensional direction, and making it incident on the reflecting surface of an annular concave mirror. CONSTITUTION:The device is provided with a laser oscillator 20 of a pulse YAG laser, etc., and a laser light 21 outputted from this laser oscillator is curved vertically by a reflecting mirror 22 provided at an angle of 45 degrees, and made incident on a condensing lens 23 whose depth of focus is large. The laser light which transmits through the condensing lens is made incident on the conical reflecting surface 27 formed in the inside of an annular concave mirror 26 by an X axis variable mirror 24 and a Y axis variable mirror 25 which becomes a pair therewith. As for the X axis variable mirror and the Y axis variable mirror, driving parts 29, 30 are driven to control, respectively by a control part 28. In such a way, since the laser light condensed to one point irradiates like a peripheral circle the outside peripheral surface of an object to be worked, the prescribed irradiation can be executed without making a laser output excessive. |
