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发明名称
ELECTRIC CHARACTERISTIC EVALUATION
摘要
申请公布号
JPH04127552(A)
申请公布日期
1992.04.28
申请号
JP19900247395
申请日期
1990.09.19
申请人
TOSHIBA CORP
发明人
MATSUZAWA KAZUYA
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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