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经营范围
发明名称
ETCHING PROCESS
摘要
申请公布号
JPH04127528(A)
申请公布日期
1992.04.28
申请号
JP19900247137
申请日期
1990.09.19
申请人
HITACHI LTD
发明人
OGAWA TARO;MOCHIJI KOZO;OCHIAI ISAO;ARAI MAKOTO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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