发明名称 |
Epoxy/polyimide copolymer blend dielectric and layered circuits incorporating it |
摘要 |
A copolymer blend of epoxy and polyimide is used as a dielectric layer in a multilayer interconnect structure. This copolymer blend is free of cracking and crazing, provides good interlayer adhesion and following fabrication, is stable at temperatures in excess of 200 DEG C. A preferred composition is a siloxane polyimide in combination with a cycloalaphatic epoxy. |
申请公布号 |
US5108825(A) |
申请公布日期 |
1992.04.28 |
申请号 |
US19910646112 |
申请日期 |
1991.01.28 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WOJNAROWSKI, ROBERT J.;EICHELBERGER, CHARLES W. |
分类号 |
C08L63/00;C08L79/08;C08L83/10;H01L23/532;H01L23/538;H05K1/00 |
主分类号 |
C08L63/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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