| 摘要 |
PURPOSE:To enable accurate inspection of a line width by a method deletion candidate pixels for a fine line processing are detected for a binary image data of a printed circuit board and the pixels to be deleted at each fine line processing are switched at each processing to obtain an octagonal distance image. CONSTITUTION:First-(n)th fine line processing means 106-107 repeat a processing (n) times to delete one pixel each from outside in a wire pattern using a binary image from a binary coding means 105 and a fine line image is generated. In first-(n)th deletion position judging means 108-109, if a 4-link edge position of the pattern is assigned as deletion position of the pixel, in 8 neighbourhood distance images, an 8-link edge position is assigned to obtain 4 neighbourhood distance images. The link of the edge is switched in a specified sequence to obtain an octagonal distance image. A length measuring means 113 of a defect detection means 112 measures the line width of the wiring pattern at a core line position of a fine line image to detect a position violating a prescribed line width. |
