| 摘要 |
PURPOSE:To offer the mask positioning device which attracts and holds a mask in safety and has high accuracy by providing a attracting means, which attracts and holds the flank of the mask frame independently of the attracting means on a reverse surface, on the surface of a positioning member where the flank of the mask frame is pressed. CONSTITUTION:A membrane 32 where the circuit pattern of the mask 30 is drawn is mounted on the mask frame 31 and four reverse-surface attracting magnetic units 4a, 4b, 4c, and 4d for attracting the reverse surface opposite side from the membrane 32 are arranged on a mask holding device 1. Further, the positioning member 3 which positions the mask 30 is provided on the mask holding surface of a mask holder 2. Two flank attracting magnetic units 5a and 5b for attracting the flank of the mask frame 31 are arranged on the positioning member 3. This configuration holds the mask and positioning member in a constant contact state at all times and highly accurate positioning becomes possible. |
