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发明名称
MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号
JPH04124814(A)
申请公布日期
1992.04.24
申请号
JP19900245888
申请日期
1990.09.14
申请人
SANYO ELECTRIC CO LTD
发明人
NAKANISHI SHIRO;ODA NOBUHIKO
分类号
H01L21/20;H01L21/02;H01L21/324;H01L27/12
主分类号
H01L21/20
代理机构
代理人
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地址
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