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发明名称
FORMATION OF BORON NITRIDE THIN FILM
摘要
申请公布号
JPH04124259(A)
申请公布日期
1992.04.24
申请号
JP19900243508
申请日期
1990.09.12
申请人
NISSIN ELECTRIC CO LTD
发明人
MIKAMI TAKASHI;NISHIYAMA SATORU;KUWABARA SO;OGATA KIYOSHI;KIRIMURA HIROYA
分类号
C23C14/06;C23C14/22
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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