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发明名称
METHOD OF FORMING TANTALUM NITRIDE FILM
摘要
申请公布号
JPH04124869(A)
申请公布日期
1992.04.24
申请号
JP19900243924
申请日期
1990.09.17
申请人
NIPPON MINING CO LTD
发明人
ISOMAE MASAO
分类号
H01L27/04;H01L21/314;H01L21/822
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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