发明名称 Device for fixing substrates to a support for chemical etching of metal layers
摘要 Device for fixing substrates to a support for chemical etching of metal layers in a spray etching machine, characterised in that the said device comprises a disc (30) made of non-magnetic material in which is located, parallel to the faces of the disc, at least one magnetised plate (31). Application particularly to the field of microelectronics. <IMAGE>
申请公布号 FR2668091(A1) 申请公布日期 1992.04.24
申请号 FR19900013048 申请日期 1990.10.22
申请人 ALCATEL TELSPACE 发明人 BUI CONG CHANH;TRAN TUY THANH
分类号 B23Q3/154;B25B11/00 主分类号 B23Q3/154
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