| 摘要 |
PURPOSE:To manufacture an electric collector body with which electricity generation of a solid electrolyte type fuel battery is improved by using a metal plate, on which an electron-transmissive and oxidation-resistant ceramic is evaporated, as an electric collector body for a solid electrolyte-type fuel battery. CONSTITUTION:After a substrate 5 is heated to, for example at the highest 1000 deg.C in a vacuum container 1 having crucibles 2a and 2b filled with La powder and Cr powder, respectively, as evaporation materials and the pressure of the vacuum container 1 is lowered to 1X10<-6>Torr, oxygen gas in at highest 1X10<-4>Torr is led to the container through a controlling and a stopping valves, and then electricity with optimum accelerating voltage and ionization current for controlling the quality of a film is applied to an ion gun, and when they become stable, reactive evaporation is started. The lanthanum ion beam radiated from the crucible 2a and the chromium ion beam radiated from the crucible 2b are evaporated on the substrate 5 and formed into a film while becoming a LaCrO3-based ceramic in the oxidizing atmosphere due to the oxygen supplied from an oxygen supplying tube 9. |
