VERFAHREN ZUM HERSTELLEN EINER GEMISCHTEN STRUKTUR FUER HALBLEITERANORDNUNG.

摘要

A method of fabricating a composite structure, in which an intermediate member (13; 29) is sandwiched between first and second members (11, 14; 22, 25), is disclosed. In this method, the intermediate member (13; 29) is disposed along the periphery of a spatial region formed between facing surfaces of the first and second members (11, 14; 22, 25) so that the spatial region is enclosed by the intermediate member (13; 29),the fluidity of the intermediate member (13; 29) is enhanced under an atmosphere having a predetermined pressure, and then the pressure of the atmosphere is increased to make the intermediate member (13; 29) flow into the spatial region.