| 发明名称 |
Scanned electron cyclotron resonance plasma source. |
| 摘要 |
<p>Electron cyclotron apparatus is described in which the locus of cyclotron resonance is scanned away from and toward the axis of a magnetic field by varying the strength of the magnetic field, the frequency of electromagnetic waves passing along its axis, or both. <IMAGE></p> |
| 申请公布号 |
EP0481198(A2) |
申请公布日期 |
1992.04.22 |
| 申请号 |
EP19910114385 |
申请日期 |
1991.08.27 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FORSTER, JOHN CURT;HOLBER, WILLIAM MARTIN;LOGAN, JOSEPH SKINNER |
| 分类号 |
H01L21/205;B01J19/08;C23C14/35;H01J37/32;H01L21/302;H01L21/3065;H01L21/31;H05H1/46 |
主分类号 |
H01L21/205 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
