发明名称 LASER MACHINING DEVICE WITH SELECTABILITY OF BEAM SHAPE
摘要 <p>A liquid crystal device (17) is disposed on an optical path for irradiating a workpiece (24) with a laser beam from a laser (11). The laser beam is applied via the liquid crystal device to the workpiece after the diameter of the laser beam is enlarged by an expander (14). A beam cross-sectional pattern, which defines desired configuration and a desired intensity distribution of the laser beam, is selectively displayed on the liquid crystal device. <IMAGE></p>
申请公布号 EP0471202(A3) 申请公布日期 1992.04.22
申请号 EP19910112055 申请日期 1991.07.18
申请人 ADVANTEST CORPORATION 发明人 AKIRA, GOISHI;TOSHIYUKI, IHARA
分类号 B23K26/06;B23K26/073;H01L21/822;H01L27/04;H01S3/00;(IPC1-7):B23K26/06 主分类号 B23K26/06
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