发明名称 |
LASER MACHINING DEVICE WITH SELECTABILITY OF BEAM SHAPE |
摘要 |
<p>A liquid crystal device (17) is disposed on an optical path for irradiating a workpiece (24) with a laser beam from a laser (11). The laser beam is applied via the liquid crystal device to the workpiece after the diameter of the laser beam is enlarged by an expander (14). A beam cross-sectional pattern, which defines desired configuration and a desired intensity distribution of the laser beam, is selectively displayed on the liquid crystal device. <IMAGE></p> |
申请公布号 |
EP0471202(A3) |
申请公布日期 |
1992.04.22 |
申请号 |
EP19910112055 |
申请日期 |
1991.07.18 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
AKIRA, GOISHI;TOSHIYUKI, IHARA |
分类号 |
B23K26/06;B23K26/073;H01L21/822;H01L27/04;H01S3/00;(IPC1-7):B23K26/06 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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