METHOD AND APPARATUS FOR CLEANING,申请号JP19900240014-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR CLEANING
摘要
申请公布号	JPH04120730(A)	申请公布日期	1992.04.21
申请号	JP19900240014	申请日期	1990.09.12
申请人	HITACHI LTD	发明人	OTSUBO TORU
分类号	H01L21/302;B08B7/00;H01L21/304;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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