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发明名称
PRODUCTION OF BORON NITRIDE FILM
摘要
申请公布号
JPH04119982(A)
申请公布日期
1992.04.21
申请号
JP19900238984
申请日期
1990.09.11
申请人
SUMITOMO ELECTRIC IND LTD
发明人
FUJITA NOBUHIKO;NAKAGAMA SHOJI;TODA NAOHIRO
分类号
C04B41/87;C23C14/06;C23C14/34
主分类号
C04B41/87
代理机构
代理人
主权项
地址
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