发明名称 WIRE-BONDING DEVICE
摘要 PURPOSE:To enable a rocking arm to have a large attenuation characteristic for bounding or vibration which is generated due to shock at the time of contact to be attenuated readily, in closing a main coil when a capillary contacts a pellet. CONSTITUTION:A drive circuit I 14 cuts off applied current to a main coil 41 of a moving coil 4 and applies current to a voltage-applied coil 42 only, thus enabling a capillary 3 to be driven at low speed until it contacts a pellet 9. When the capillary 3 contacts a pellet and output of a speed detector 7 reaches 0, a switching circuit 13 sets a switch 16 within the drive circuit I 14 to (b) side, thus enabling the main coil 41 to be short-circuited. At the same time, the switching circuit 13 selects a signal from a pressure command circuit 12 and applies a certain amount of current to the voltage-applied coil 42, thus enabling a certain amount of bonding pressure to be applied to the pellet 9. When the capillary 3 contacts the pellet 9, bounding or vibration easily occurs due to shock at the time of contact. However, the number of windings of the main coil 41 is large and a back electromotive force constant is large, thus enabling bounding or vibration to be attenuated readily.
申请公布号 JPH04120746(A) 申请公布日期 1992.04.21
申请号 JP19900242162 申请日期 1990.09.12
申请人 NEC CORP 发明人 MATSUMOTO ITARU
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址