| 摘要 |
PURPOSE:To improve reliability by laminating forming first and second optical films on the surface of one photodiode, forming the first optical film on the surface of the other photodiode, and forming the second optical film around the photodiode. CONSTITUTION:Since first and second optical films 33 and 34 having high film thickness accuracy are formed on the surface of one photodiode 24 and defined as a reflection control film 35, the optimum reflection control film can be obtained. On the other hand, since the second optical film 34 is formed so as to be remained around another photodiode 25 although this second optical film 34 in the upper layer is eliminated in the other photodiode 25, the first optical film 33 having adverse coverage can be protected at a step part around the photodiode 25, and the other photodiode 25 is protected without fail in the selective etching of the second optical film 34. Thus, reliability can be improved. |
