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发明名称
LOGIC INTEGRATED CIRCUIT
摘要
申请公布号
JPH04118963(A)
申请公布日期
1992.04.20
申请号
JP19900236945
申请日期
1990.09.10
申请人
HITACHI LTD;HITACHI MICRO COMPUT ENG LTD
发明人
INAGAKI MITSUYA;SHIMIZU TERUHISA;TANBA EISAKU
分类号
H01L29/73;H01L21/331;H01L21/8238;H01L21/8249;H01L27/06;H01L27/092
主分类号
H01L29/73
代理机构
代理人
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