发明名称 |
FORMATION OF THIN OXIDE LAYERS |
摘要 |
Coating apparatus includes plural chambers having at least restricted communication therebetween to inhibit the transfer of fluid treating material but not of a substrate. A primary treating chamber includes means for supplying a vapor solvent, means for applying a spray solution and means for delivering water vapor. Heating means are provided.
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申请公布号 |
US3683848(A) |
申请公布日期 |
1972.08.15 |
申请号 |
USD3683848 |
申请日期 |
1970.01.19 |
申请人 |
GLAVENBEN SA. |
发明人 |
EMILE PLUMAT;PIERRE BOHAIN;ALBERT SERVAIS |
分类号 |
C04B41/86;C03C17/25;C04B41/87;C23C22/73;(IPC1-7):C23C13/08 |
主分类号 |
C04B41/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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