发明名称 A METHOD OF DOPING A GAS-PHASE SEMICONDUCTOR LAYER
摘要 1285686 Electroluminescence HITACHI Ltd 8 Sept 1970 [12 Sept 1969 2 March 1970] 42953/70 Heading C4S [Also in Division H1] During the epitaxial growth from the gas phase of a layer of an A<SP>III</SP>B<SP>V</SP> compound on to a substrate of the same material, the material of an impurity source is evaporated into a carrier gas (H 2 ) which is passed into the deposition vessel, the impurity source being SnI 4 , SnBr 4 , GeI 4 , GeBr 4 , solid solutions obtained from combinations of these, or a mixture of S and S 2 Cl 2 . Particular semiconductor compounds given are InAs, GaAs, GaP, and GaAsP x(1-x). The process may be used in the formation of light-emitting diodes.
申请公布号 GB1285686(A) 申请公布日期 1972.08.16
申请号 GB19700042953 申请日期 1970.09.08
申请人 HITACHI LIMITED 发明人
分类号 H01L21/00;H01L21/205 主分类号 H01L21/00
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