MANUFACTURE OF THIN-FILM SEMICONDUCTOR DEVICE,申请号JP19900237335-传众专利搜索

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发明名称	MANUFACTURE OF THIN-FILM SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH04116929(A)	申请公布日期	1992.04.17
申请号	JP19900237335	申请日期	1990.09.07
申请人	SEIKO EPSON CORP	发明人	IWAMATSU SEIICHI
分类号	H01L21/306;H01L21/02;H01L21/304;H01L21/308;H01L21/336;H01L29/78;H01L29/786	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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