| 摘要 |
PURPOSE:To achieve a highly accurate alignment by making comparison with a reference waveform signal with an alignment signal waveform which is obtained as a result of an improved alignment result as a reference signal. CONSTITUTION:A reference wafer is produced and its matching waveform is taken out of a detection signal of a wafer step. In this case, wafer matching is performed using a mask simultaneously. Amount of deviation is measured and an improved matching mark signal is set to a reference signal, and it is recorded into memory, thus enabling the reference signal waveform to be created. An image processor 21 has a waveform comparison circuit 27 which compares an alignment detection signal take-out circuit 24 from a CPU 22 and a waveform which is output from an image memory 26 through an amplifier 25 and an output of the waveform comparison circuit 27 is fed back to the CPU 22 and is fed to an NSR main body 23 through the CPU, thus achieving matching. |
