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发明名称
METHODE ZUR TEILUNG EINES SUBSTRATES IN MEHRERE TEILE.
摘要
申请公布号
DE3684281(D1)
申请公布日期
1992.04.16
申请号
DE19863684281
申请日期
1986.12.16
申请人
SEIKO INSTRUMENTS INC., TOKIO/TOKYO, JP
发明人
KAWAHARA, YUKITO;MUKAINAKANO, HIROSHI;MACHIDA, SATOSHI, TOKYO, JP
分类号
H01L21/301;B28D5/00;B28D5/02;H01L21/304;H01L31/02;(IPC1-7):H01L21/302
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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