摘要 |
<p>In the method of this invention, lens arrays for light sensitive devices are made which have lenses that are substantially transparent over the wavelength range from 400 nm to 1000 nm comprising the steps of: a) providing a spacer and planarization layer on the device over each sensing element; b) applying a layer of photoresist material; c) patterning and flowing the photoresist material to form a desired lens array on the spacer and planarization layer by applying heat; and d) conformally coating the so formed lenses with a layer of a transparent conductor material.</p> |