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发明名称
MANUFACTURING APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号
JPH04115551(A)
申请公布日期
1992.04.16
申请号
JP19900236177
申请日期
1990.09.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
FUKAMI NORIO
分类号
H01L21/67;H01L21/301;H01L21/68;H01L21/78
主分类号
H01L21/67
代理机构
代理人
主权项
地址
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