| 摘要 |
A fluxmeter which provides for a pneumatic means for measuring an amount of plasma energy flux flowing into a semiconductor wafer provides for a non-electrical means of measuring energy flux. A bulb has one end exposed to the plasma while the opposite end is supported by a heat sink. When plasma is applied, gas pressure in the bulb changes due to a change in temperature. This change in gas pressure is measured to provide a direct correlation to a value of energy flux impinging on the fluxmeter. |
