ELECTRODE FOR VERTICAL TYPE PLASMA CVD DEVICE,申请号JP19900236124-传众专利搜索

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发明名称	ELECTRODE FOR VERTICAL TYPE PLASMA CVD DEVICE
摘要
申请公布号	JPH04116174(A)	申请公布日期	1992.04.16
申请号	JP19900236124	申请日期	1990.09.05
申请人	KOKUSAI ELECTRIC CO LTD	发明人	SAITO SEIICHIRO;AOKI DAIYA;MURAMATSU FUMIO;SUZUKI MASAYUKI
分类号	C23C16/50;C23C16/505	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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