GAS REMOVING DEVICE AND METHOD FOR WAFER HOLDER,申请号JP19900232594-传众专利搜索

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发明名称	GAS REMOVING DEVICE AND METHOD FOR WAFER HOLDER
摘要
申请公布号	JPH04116165(A)	申请公布日期	1992.04.16
申请号	JP19900232594	申请日期	1990.09.04
申请人	SONY CORP	发明人	KOYAMA KAZUHIDE
分类号	C23C14/34;C23C14/50;H01L21/203	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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