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经营范围
发明名称
THINNING METHOD OF PARTICLE IN PARTICLE ACCUMULATION RING
摘要
申请公布号
JPH04115500(A)
申请公布日期
1992.04.16
申请号
JP19900235148
申请日期
1990.09.05
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
NAKAMURA TAKESHI;SUGIYAMA TAKU;YAMAZAKI TETSUO
分类号
H05H7/10;H05H13/04
主分类号
H05H7/10
代理机构
代理人
主权项
地址
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