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发明名称
PROBE CARD
摘要
申请公布号
JPH04115545(A)
申请公布日期
1992.04.16
申请号
JP19900238713
申请日期
1990.09.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAZAKI YASUHIRO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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