| 摘要 |
PURPOSE:To quickly and surely adjust the apparatus and to save labor for inspection by storing the time from emission to reception of an ultrasonic wave when a peak of an echo is obtained, and automatically controlling the posture of the apparatus to a sample so as to maintain the same condition during scanning. CONSTITUTION:A pulse is generated from an ultrasonic wave transceiver part 2 in response to a command from an operating processor 10. When the ultrasonic pulse is sent to a sample 9 by an array transducer 1, an echo is generated at every discontinuous part such as a bonding surface or the like and sequentially received by the transducer 1. The received echo is detected and multiplied by the transceiver part 2 and sent to an echo measurer 3. At the start of the focus adjustment (referred to as the adjustment work), the measurer 3 detects a peak value of the echo of the connecting part at a reference point in the scanning range and the receiving time, and further detects a peak value of an echo and the receiving time during the adjustment work. The measurer 3 outputs errors and variance of these values. A mechanical coordinate control part 4 controls a Z-axis driving/detecting part 6 and a theta axis driving/ detecting part 7 of a scanner 5 so as to bring the errors and variance close to zero. Because of the adjustment work of the control part 4, the scanning focal plane is made close to the surface to be visualized. |
