HIGH-AND LOW-TEMPERATURE HANDLER,申请号JP19900233272-传众专利搜索

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发明名称	HIGH-AND LOW-TEMPERATURE HANDLER
摘要
申请公布号	JPH04115546(A)	申请公布日期	1992.04.16
申请号	JP19900233272	申请日期	1990.09.05
申请人	HITACHI LTD;HITACHI SHIMIZU ENJINIARINGU KK	发明人	MASUDA SHINTARO;KURITA YOSHINORI;IMAIZUMI TADAHIRO
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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