Liquid cooling system for LSI packages.

摘要

In a liquid cooling system for a printed circuit board (1) on which integrated circuit packages (2) are mounted, heat sinks (3) are secured respectively to the packages in heat transfer contact therewith. Nozzles (8) are provided in positions corresponding to the heat sinks. A housing (5) is tightly sealed to the printed circuit board to enclose the packages, heat sinks and nozzles in a cooling chamber. A feed pump (12) pressurizes working liquid cooled by a heat exchanger (11) and supplies the pressurized liquid to the nozzles for ejecting liquid droplets to the heat sinks. A liquid suction pump (15) is connected to an outlet (9) of the housing for draining liquid coolant to the heat exchanger. A vapour suction pump (32) can be connected to a second outlet (30) of the housing for sucking vaporized coolant to the heat exchanger. The cooling chamber is maintained at a sub-atmospheric pressure to promote nucleate boiling of the working liquid by means of a pressure regulating system controlling the pumping and responsive to liquid flow. In an alternative embodiment (Figure 7) liquid is sucked in through nozzles adjacent the heat sinks.