MANUFACTURE OF ULTRASONIC PROBE

摘要

PURPOSE:To attain accurate alignment between a lower electrode and a concave lens face by placing a point light source to a lower prescribed position to allow a light radiate the convex lens face thereby deciding a forming position of the lower electrode. CONSTITUTION:A collimated beam 26 radiated from the lower part of a board 25 radiates an acoustic lens 21 side as a point light source from a point hole 25a. In this case, the beam 26A reaching a convex lens face 23 is collimated as a beam 26B by the diffraction in the lens border face and the beam 26B proceeds upward in an acoustic lens 21. When the collimated beam 26B reaches a resist 22, the resist 22 is photo-sensitized by the collimated beam 26B. Then the part 22a of the resist positioned by the concave lens face 23 is identified. Conversely, when the resist part is decided as the forming position of a lower electrode, the forming position of the lower electrode aligned accurately with respect to the concave lens face 23 by the exposure of the resist 22.