| 摘要 |
<p>A method for determining the surface profile of diffusion-reflecting objects provides for interferometrical comparison of the light beams reflected by a reference mirror (5) and by the object (11), deviation of the optical path of the object beam, focusing the object beam on a plane corresponding to a zero difference between the path lengths of the interferometrically compared beams and measuring said optical path change between the initial value and up to the moment of obtaining the interference picture of the maximum contrast. A device for implementing the method comprises an objective (1) and, consecutively mounted, a coherent radiation source (2), and an interferometer (3) comprising a light divider (4), a reference mirror (5) located on one side (6) of the surface of the light divider (4) perpendicularly to the beam path and an optical path modulator (7) mounted on the other side (9) of the surface of the light divider (4) with the possibility of oscillating movement along the beam path and provided with a unit (8) for measuring its displacement. The device further comprises a photoreceiver (12), a unit (13) for determining the contrast of the interference lines and a unit (14) for fixing the position of the modulator (7). The modulator (7) is provided with a corner reflector (10) whose axis of symmetry is parallel to the beam path and is located beyond the plane of the light divider (4). The objective (1) is designed so as to provide for the possibility of optical conjugation of the coherent radiation source (2) with the plane corresponding to the zero path difference of the interferometer (3).</p> |
