METHOD AND DEVICE FOR CHARGED PARTICLE BEAM LITHOGRAPHY,申请号JP19900234262-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号	JPH04114421(A)	申请公布日期	1992.04.15
申请号	JP19900234262	申请日期	1990.09.04
申请人	JEOL LTD	发明人	SUGATA MASANORI;ISOBE MORIYUKI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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