Method of fabrication and trimming of a pressure sensor.

摘要

A method of fabricating a pressure sensor (10) comprising the steps of: disposing a pressure sensing element (32) within a first chamber (22) within a portion of a package of the pressure sensor; disposing a signal processing element (36) within a second chamber (20) within the package portion; electrically interconnecting the pressure sensing and signal processing elements; leaving the second chamber (20) and the signal processing element (36) therein unenclosed while hermetically enclosing the first chamber (22) and exposing the pressure sensing element (32) to apparatus which generates a preselected test pressure; contacting the signal processing element (36) for adjusting the electrical parameters thereof in accordance with the test pressure; removing the test pressure; and sealing a top cover member (14) to the package portion for hermetically sealing the two chambers from one another while providing a port (34) which provides access to the first chamber (22).