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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04113665(A)
申请公布日期
1992.04.15
申请号
JP19900233536
申请日期
1990.09.03
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HIRAI TAKEHIRO;KANDA AKIHIRO;TANAKA MITSUO;NAKATANI MASAHIRO
分类号
H01L21/3205;H01L21/822;H01L23/52;H01L27/04
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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