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发明名称
PROCESSING OF SEMICONDUCTOR THIN SHEET
摘要
申请公布号
JPH04114429(A)
申请公布日期
1992.04.15
申请号
JP19900235170
申请日期
1990.09.04
申请人
SANYO ELECTRIC CO LTD
发明人
HORIUCHI KAZUYUKI
分类号
H01L21/31;H01L21/22
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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