| 摘要 |
<p>The clean room arrangement (2) comprises a clean room (1) having an upper portion (4) and a lower portion (6). Clean air is introduced into the upper portion (4) of the clean room (1), flows downward and expelled from the lower portion (6) of the clean room (1). An air recirculation passage (7) is connected to the clean room (1) such that the lower portion (4) of the clean room (1) is communicated with the upper portion (4) of the clean room (1). A warm heat source (8) is provided in the air recirculation passage (7) to generate an ascending flow of air in the air recirculation passage (7) so that the air descends in the clean room (1) due to a natural convection. <IMAGE></p> |
