| 摘要 |
PURPOSE:To improve the efficiency of measurement by a constitution wherein a probe shaft can move to be displaced freely while a contact is made to touch a free curved surface constantly even when said surface, an object of the measurement, changes the direction. CONSTITUTION:In the automatic measurement, a probe shaft 4 moves along the free curved surface 81A of a work piece 81, which is an object of the measurement, and on the occaision, a motor 26 is driven by a control unit 77 to shift the direction of the actuation of a spring, whereby a contact 5 is made to touch the free curved surface 81A constantly. Accordingly, the probe shaft 4 rotates when it moves along a part wherein a reference track is not in accord with said surface 81A. This rotation of the probe shaft 4 is detected as components in the directions of rectangular X and Y axes by displacement detectors 41 and 42, while the displacement with the movement thereof in the direction of a Z axis is detected by a displacement detector 16. That is, the deviation of the track of the moved and displaced contact 5 from the reference track is detected in sequence, and detection signals thus obtained are input to a signal processing unit 76. |
