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发明名称
DIELECTRIC CERAMICS FOR ELECTROSTATIC CHUCKS AND METHOD OF MAKING THEM
摘要
申请公布号
US5104834(A)
申请公布日期
1992.04.14
申请号
US19890343805
申请日期
1989.04.26
申请人
TOT LTD.
发明人
WATANABE, TOSHIYA;KITABAYASHI, TETSUO;NAKAYAMA, CHIAKI
分类号
C04B35/111;C04B35/64;H01L21/683
主分类号
C04B35/111
代理机构
代理人
主权项
地址
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