ALIGNMENT TRANSFER METHOD AND ALIGNMENT TRANSFER DEVICE

摘要

PURPOSE:To perform a transferring accurately with high dimensional precision and reproducibility by aligning a pattern transfer plate to a work plate under a state that the pressure is reduced, sticking the two each other, opening the pattern transfer plate and a work plate outside space to the atmospheric pressure, and sticking the two each other. CONSTITUTION:A pattern transfer plate 1 and a work plate 2 are arranged facing each other. Pressures in a pattern transfer plate outside space 4 to which a face 1b of the pattern transfer plate 1 contacts and a space between the two plates are to be reduced to the same pressure. The pattern transfer plate 1 is aligned to the work plate 2 by keeping the pressure reduced so as to stick the pattern transfer plate 1 to the work plate 2 statically. The pattern transfer plate 1 is attached with pressure to the work plate 2 and transfer patterns 3 are contacted to the work plate 2. The pattern transfer plate outside space 4 is opened to the atmospheric pressure by keeping the pressure between the two plates reduced. The pattern transfer plate 1 and the work plate 2 are attached to each other with pressure by the atmospheric pressure so that the contacting uniformity will be improved. The pattern transfer plate 1 is separated from the work plate 2 so as to transfer the transfer patterns 3 of the pattern transfer plate 1 on the work plate 2 and form patterns.